@book{ Solr-198561, title = {Chemical vapour deposition : an integrated engineering design for advanced materials}, series = {Engineering materials and processes}, author = {Xu, Yongdong}, editor = {Yan, Xiu-Tian}, editor = {Xu, Yongdong}, address = {London}, publisher = {Springer}, year = {2010}, note = {englisch}, url = { http://wwwzb.fz-juelich.de/contentenrichment/inhaltsverzeichnisse/2010/9781848828933.pdf } }