Mechanische Relaxationsmessungen an Al-Metallisierungsschichten [E-Book] / Martin Prieler
mechanical relaxation measurements on aluminum metallization layers
Saved in:
Full text JuSER |
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Personal Name(s): | Prieler, Martin, author |
Imprint: |
Jülich :
Forschungszentrum, Zentralbibliothek,
1993
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Physical Description: |
1 Online-Ressource (75 Seiten) |
Note: |
deutsch |
Series Title: |
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Berichte des Forschungszentrums Jülich ;
2780 |
Dissertation Note: |
Zugleich: Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen
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Subject (ZB): | |
Classification: |
mechanical relaxation measurements on aluminum metallization layers |