Herstellung und Wachstum einkristalliner Si/CoSi2/Si-Heterostrukturen nach Hochdosis-Ionenimplantation [E-Book] / von Karl Kohlhof
preparation and growth of monocrystalline silicon/cosi2/silicon heterostructures after high dose ion implantation
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Full text JuSER |
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Personal Name(s): | Kohlhof, Karl, author |
Imprint: |
Jülich :
Kernforschungsanlage, Zentralbibliothek,
1989
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Physical Description: |
1 Online-Ressource ([4], 88 Seiten) |
Note: |
abstract in English deutsch |
Series Title: |
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Berichte der Kernforschungsanlage Jülich ;
2299 |
Dissertation Note: |
Zugleich: Dissertation, Universität Köln
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Classification: |
preparation and growth of monocrystalline silicon/cosi2/silicon heterostructures after high dose ion implantation |