Hofer, W. O. (1985). Physical sputtering of elemental metals and semiconductors: [E-Book] / by Wolfgang O. Hofer. Jülich: Kernforschungsanlage, Zentralbibliothek.
Chicago Style CitationHofer, Wolfgang Otto. Physical Sputtering of Elemental Metals and Semiconductors: [E-Book] / By Wolfgang O. Hofer. Jülich: Kernforschungsanlage, Zentralbibliothek, 1985.
MLA CitationHofer, Wolfgang Otto. Physical Sputtering of Elemental Metals and Semiconductors: [E-Book] / By Wolfgang O. Hofer. Jülich: Kernforschungsanlage, Zentralbibliothek, 1985.
Warning: These citations may not always be 100% accurate.