Poröses Silicium für die Mikrooptik : Herstellung, Mikrostruktur und optische Eigenschaften von Einzelschichten und Schichtsystemen [E-Book] / Michael Götz Berger
porous silicon for the microoptics: production, characterization, microstructure and optical properties of single layers and layer systems
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Full text JuSER |
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Personal Name(s): | Berger, Michael Götz, author |
Imprint: |
Jülich :
Forschungszentrum, Zentralbibliothek,
1996
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Physical Description: |
1 Online-Ressource (X, 167 Seiten) |
Note: |
deutsch |
Series Title: |
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Berichte des Forschungszentrums Jülich ;
3219 |
Dissertation Note: |
Zugleich: Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen
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Subject (ZB): | |
Classification: |
porous silicon for the microoptics: production, characterization, microstructure and optical properties of single layers and layer systems |