Plasma processing for materials production / prepared by Westinghouse Electric Corporation, Research & Development Center ; principal investigator, M.G. Down ; prepared for Electric Power Research Institute.

Saved in:
Down, M. G.
Palo Alto, Calif. : The Institute, 1982.
1 v. (various pagings)
"Final report, December 1982."
"Research project 1275-9."
englisch
EPRI ; EM-2771.
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084 0 |a FGKJ - Plasma processing, etching  |2 ZB 
245 0 0 |a Plasma processing for materials production /   |c prepared by Westinghouse Electric Corporation, Research & Development Center ; principal investigator, M.G. Down ; prepared for Electric Power Research Institute. 
260 |a Palo Alto, Calif. :   |b The Institute,   |c 1982. 
300 |a 1 v. (various pagings) 
490 0 |a EPRI ;   |v EM-2771. 
500 |a "Final report, December 1982." 
500 |a "Research project 1275-9." 
500 |a englisch 
596 |a 1 
650 4 |a plasma processing 
700 1 |a Down, M. G. 
710 2 |a Westinghouse Electric Corporation.  |b Research & Development Center. 
710 2 |a Electric Power Research Institute. 
901 |a EPRI-EM-2771 
908 |a Bericht, Gutachten 
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