Principles of physical vapor deposition of thin films [E-Book] / K.S. Sree Harsha.
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered...
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Full text |
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Personal Name(s): | SreeHarsha, K. S. |
Edition: |
1st ed. |
Imprint: |
Amsterdam ; Boston ; London :
Elsevier,
2006
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Physical Description: |
1 online resource (xi, 1160 p.) : ill. |
Note: |
englisch |
ISBN: |
9780080446998 008044699X 9780080480312 0080480314 |
Subject (LOC): |
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. * Offers detailed derivation of important formulae. * Thoroughly covers the basic principles of materials science that are important to any thin film preparation. * Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text. |