Principles of physical vapor deposition of thin films [E-Book] / K.S. Sree Harsha.
SreeHarsha, K. S.
1st ed.
Amsterdam ; Boston ; London : Elsevier, 2006
1 online resource (xi, 1160 p.) : ill.
Full Text
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. * Offers detailed derivation of important formulae. * Thoroughly covers the basic principles of materials science that are important to any thin film preparation. * Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text.