Analysis of microelectronic materials and devices.
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Personal Name(s): | Grasserbauer, Manfred, editor |
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Imprint: |
Chichester :
Wiley,
1991.
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Physical Description: |
XLVI, 934 S. |
Note: |
englisch |
ISBN: |
9780471917137 0471917133 |
Keywords: |
Bulk analysis of microelectronic materials activation analysis mass spectrometry using spark and laser excitation AAS (atomic absorption spectroscopy) and ICP OES (inductively coupled plasma optical emission spectroscopy) IR spectroscopy DLTS Analysis of surfaces, interfaces and thin films x-ray photoelectron spectroscopy (XPS) micro- Raman spectroscopy laser microprobe mass spectrometry (LAMMA) scanning electron microscopy and x-ray microanalysis analytical (transmission) electron microscopy high voltage transmission electron microscopy scanning Auger electron spectrometry low energy ion scattering inorganic secondary ion mass spectrometry (SIMS) SIMS analysis of III-V compound microelectronic materials static (time of flight) secondary ion mass spectrometry sputtered neutral mass spectrometry (SNMS) Rutherford backscattering spectrometry elastic recoil detection (ERD) nuclear reaction analysis Structure analysis on an atomic scale basic x-ray diffraction methods double crystal x-ray diffraction and topography x-ray absorption fine structure spectroscopy scanning tunneling microscopy (STM) Physical, electrical and geometrical characterization ellipsometry differential reflection spectrometry electron beam electroreflectance (EBER) scanning acoustic microscopy infrared microscopy scanning optical microscopy electron beam testing of microelectronic devices surface resistivity measurements capacitance/voltage and Hall effect measurements x-ray microscopy techniques for characterization and failure analysis of integrated circuits |
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Classification: | |
Shelf Classification: |
ZB | |
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Reading Room Call number: FGM 075 Barcode: 1093102368 Available | |
IEK-14 | |
Institute Call number: B 071827'01' Barcode: 1093102719 Checked Out Place a Hold |