Implantation of boron in silicon.
Saved in:
Personal Name(s): | Hofker, W. K. |
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Imprint: |
Eindhoven :
Philips,
1975.
|
Physical Description: |
121 S. |
Note: |
englisch |
Keywords: |
ion implantation : b boron implantation : si |
Classification: |
ZB | |
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Open Stacks Call number: Z 000515-1975,S008 Barcode: 9900003926 Available |