Advances in rapid thermal and integrated processing : NATO advanced study institute on advances in rapid thermal and integrated processing: proceedings : Acquafredda-di-Maratea, 03.07.95-14.07.95.
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Personal Name(s): | Roozeboom, F., editor |
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Imprint: |
Dordrecht :
Kluwer Academic Publ.,
1996.
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Physical Description: |
XII, 565 S. |
Note: |
englisch |
ISBN: |
9780792340119 0792340116 |
Series Title: |
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NATO ASI series. E. Applied sciences
vol 0318. |
Keywords: |
photon induced annealing of semiconductor and related materials process integration deposition and processing of thin films |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
ZB | |
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Reading Room Call number: FGM 085 Barcode: 1096102938 Available |