Diagnostic techniques for semiconductor materials processing vol 0002: symposium : Symposium on diagnostic techniques for semiconductors materials processing vol 0002 : MRS fall meeting 1995 : Boston, MA, 27.11.95-30.11.95.
in situ diagnostics
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Personal Name(s): | Pang, S. W., editor |
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Imprint: |
Pittsburgh, PA :
Materials Research Society,
1996.
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Physical Description: |
XV, 585 S. |
Note: |
englisch |
ISBN: |
1558993096 9781558993099 |
Series Title: |
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Materials Research Society symposium proceedings ;
406. |
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ZB | |
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Reading Room Call number: FAF 007-406 Barcode: 1096101451 Available |