Rapid thermal and integrated processing 0004: symposium : MRS spring meeting 1995 : San-Francisco, CA, 17.04.95-20.04.95.
Saved in:
Personal Name(s): | Brueck, S. R., editor |
---|---|
Imprint: |
Pittsburgh,PA :
Materials Research Society,
1995.
|
Physical Description: |
XIII, 454 S. |
Note: |
englisch |
ISBN: |
9781558992900 1558992901 |
Series Title: |
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Materials Research Society symposium proceedings ;
387. |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
LEADER | 01193cam a2200337 n 4500 | ||
---|---|---|---|
001 | 49994 | ||
005 | 19980415000000.0 | ||
008 | r1995 | ||
020 | |a 1558992901 | ||
035 | |a (Sirsi) a48441 | ||
084 | 0 | |a FGA - Materials processing - general aspects |2 ZB | |
084 | 1 | |a FAF - Materialforschung - allgemeine Serien |2 LS | |
245 | 0 | 0 | |a Rapid thermal and integrated processing 0004: symposium : |b MRS spring meeting 1995 : San-Francisco, CA, 17.04.95-20.04.95. |
260 | |a Pittsburgh,PA : |b Materials Research Society, |c 1995. | ||
300 | |a XIII, 454 S. | ||
490 | 0 | |a Materials Research Society symposium proceedings ; |v 387. | |
500 | |a englisch | ||
596 | |a 1 | ||
650 | 4 | |a materials processing | |
650 | 4 | |a modeling | |
650 | 4 | |a sensor (technical and physical) | |
650 | 4 | |a control | |
650 | 4 | |a dielectric material | |
650 | 4 | |a epitaxy | |
650 | 4 | |a metallization | |
700 | 1 | |a Brueck, S. R., |e Hrsg. | |
710 | 2 | |a Materials Research Society. | |
900 | |a FAF 007-387 | ||
900 | |a S 004937-0387'01' | ||
908 | |a Konferenz | ||
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