Multicompound and multilayered thin films for advanced microtechnologies: techniques, fundamentals and devices : NATO advanced study institute on multicomponent and multilayered thin films for advanced microtechnologies: proceedings : Bad-Windsheim, 21.09.92-02.10.92.

Saved in:
Auciello, O., (editor)
Dordrecht : Kluwer Academic Publ., 1993.
XV, 633 S.
englisch
9780792322658
0792322657
NATO ASI series. E. Applied sciences 234.

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