Micro system technologies 1994 : International conference on micro electro, opto, mechanical systems and components 0004 : Micro system technologies: international conference 0004 : MST 1994 : Berlin, 19.10.94-21.10.94.

nano manufacturing

Saved in:
Reichl, H., (editor)
Berlin : VDE Verl., 1994.
1212 S.
englisch
3800720582
9783800720583
International Conference on Micro Electro, Opto, Mechanical Systems and Components ; 0004.

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