Advanced metallization for devices and circuits - science, technology and manufacturability: symposium : San-Francisco, CA, 04.04.94-08.04.94.
Advanced metallization for devices and circuits: science, technology and manufacturability :
Saved in:
Personal Name(s): | Murarka, Shyam P., editor |
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Imprint: |
Pittsburgh, PA :
Materials Research Society,
1994.
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Physical Description: |
XV, 768 S. |
Note: |
englisch |
ISBN: |
9781558992375 1558992375 |
Series Title: |
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Materials Research Society symposium proceedings ;
337. |
Subject (ZB): | |
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ZB | |
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