Advanced metallization for devices and circuits - science, technology and manufacturability: symposium : San-Francisco, CA, 04.04.94-08.04.94.
Advanced metallization for devices and circuits: science, technology and manufacturability :
Saved in:
Personal Name(s): | Murarka, Shyam P., editor |
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Imprint: |
Pittsburgh, PA :
Materials Research Society,
1994.
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Physical Description: |
XV, 768 S. |
Note: |
englisch |
ISBN: |
9781558992375 1558992375 |
Series Title: |
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Materials Research Society symposium proceedings ;
337. |
Subject (ZB): | |
Classification: |
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001 | 50416 | ||
005 | 20040607081200.0 | ||
008 | r1994 | ||
020 | |a 1558992375 | ||
035 | |a (Sirsi) a48838 | ||
084 | 0 | |a FGMH - Metallization, physics of microelectronics |2 ZB | |
245 | 0 | 0 | |a Advanced metallization for devices and circuits - science, technology and manufacturability: symposium : |b San-Francisco, CA, 04.04.94-08.04.94. |
260 | |a Pittsburgh, PA : |b Materials Research Society, |c 1994. | ||
300 | |a XV, 768 S. | ||
490 | 0 | |a Materials Research Society symposium proceedings ; |v 337. | |
500 | |a englisch | ||
520 | |a Advanced metallization for devices and circuits: science, technology and manufacturability : | ||
520 | |a manufacturability, challenges of interconnections | ||
520 | |a chemomechanical polishing, advanced planarization technology | ||
520 | |a copper interconnection metallization | ||
520 | |a diffusion barriers, adhesion promoters for copper technology and for aluminum metallization | ||
520 | |a contacts to gaas | ||
520 | |a contacts to inp | ||
520 | |a novel metal schemes on semiconductors | ||
520 | |a silicides | ||
520 | |a reliability, electromigration and stress migration | ||
520 | |a deposition of refractory metals and alloys | ||
520 | |a novel materials, processes and reliability | ||
520 | |a metals on polymer dielectrics, glasses, ceramics | ||
520 | |a characterization techniques and etching | ||
596 | |a 1 | ||
650 | 4 | |a metallization | |
700 | 1 | |a Murarka, Shyam P., |e Hrsg. | |
710 | 2 | |a Materials Research Society. | |
900 | |a S 004937-0337'01' | ||
908 | |a Konferenz | ||
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