Submicrometer metallization: the challenges, opportunities, and limitations : Submicrometer metallization: the challenges, opportunities, and limitations: conference : SPIE symposium on microelectronic processing : San-Jose, CA, 23.09.92-25.09.92.

metallization and interconnection

Saved in:
Kwok, T., (editor)
Bellingham, WA : SPIE-The International Society for Optical Engineering, 1993.
IX, 344 S.
englisch
9780819410030
0819410039
SPIE proceedings ; vol 1805.

ZB
Open Stacks Call Number: S 002308-1805'01' Barcode: 1094102868 Available