Gas phase and surface chemistry in electronic materials processing: symposium: proceedings : MRS fall meeting 1993 : Boston, MA, 29.11.93-02.12.93.
electronic materials processing:
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Personal Name(s): | Mountziaris, T. J., editor |
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Imprint: |
Pittsburgh, PA :
Materials Research Society,
1994.
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Physical Description: |
XVI, 556 S. |
Note: |
englisch |
ISBN: |
1558992332 9781558992337 |
Series Title: |
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Materials Research Society symposium proceedings ;
334. |
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Reading Room Call number: FAF 007-334 Barcode: 1094101968 Available |