Metal organic chemical vapor deposition of electronic ceramics : Metalorganic chemical vapor deposition of electronic ceramics: symposium : MRS fall meeting 1993 : Boston, MA, 29.11.93-03.12.93.
Metalorganic chemical vapor deposition of electronic ceramics :
Saved in:
Personal Name(s): | Desu, Seshu B., editor |
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Imprint: |
Pittsburgh, PA :
Materials Research Society,
1994.
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Physical Description: |
XI, 366 S. |
Note: |
englisch |
ISBN: |
9781558992344 1558992340 |
Series Title: |
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Materials Research Society symposium proceedings ;
335. |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
LEADER | 01510cam a2200373 n 4500 | ||
---|---|---|---|
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005 | 19980415000000.0 | ||
008 | r1994 | ||
020 | |a 1558992340 | ||
035 | |a (Sirsi) a48986 | ||
084 | 0 | |a FGKF - Chemical vapor deposition |2 ZB | |
084 | 0 | |a FNPH - Ceramics for specific applications |2 ZB | |
084 | 1 | |a FAF - Materialforschung - allgemeine Serien |2 LS | |
245 | 0 | 0 | |a Metal organic chemical vapor deposition of electronic ceramics : |b Metalorganic chemical vapor deposition of electronic ceramics: symposium : MRS fall meeting 1993 : Boston, MA, 29.11.93-03.12.93. |
260 | |a Pittsburgh, PA : |b Materials Research Society, |c 1994. | ||
300 | |a XI, 366 S. | ||
490 | 0 | |a Materials Research Society symposium proceedings ; |v 335. | |
500 | |a englisch | ||
520 | |a Metalorganic chemical vapor deposition of electronic ceramics : | ||
520 | |a Mocvd of nonoxide electronic ceramics | ||
520 | |a ferroelectric materials | ||
520 | |a modeling | ||
520 | |a precursor design and delivery: deposition reactors | ||
520 | |a high t(c) superconductors | ||
520 | |a optoelectronic materials, oxide ceramics | ||
596 | |a 1 | ||
650 | 4 | |a chemical vapor deposition | |
650 | 4 | |a ceramics | |
700 | 1 | |a Desu, Seshu B., |e Hrsg. | |
710 | 2 | |a Materials Research Society. | |
900 | |a FAF 007-335 | ||
900 | |a S 004937-0335'01' | ||
908 | |a Konferenz | ||
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