Plasma synthesis and etching of electronic materials : Symp : Boston, MA, 27.11.1984-30.11.1984.
Saved in:
| Personal Name(s): | Chang, R. P., editor |
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| Imprint: |
Pittsburgh, PA :
Materials Research Society,
1985.
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| Physical Description: |
XV, 522 S. |
| Note: |
englisch |
| ISBN: |
9780931837036 0931837030 |
| Series Title: |
Materials Research Society symposia proceedings ;
38. |
| Keywords: |
plasma processing : semiconductor preparation |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
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Reading Room  Call number: FAF 007-38 Barcode: 1086001330
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