Symposium on Multilevel Metallization, Interconnection and Contact Technologies: proceedings : Meeting of the Electrochemical Society. 0169 : San-Diego, CA, 21.10.86-22.10.86.
Saved in:
Personal Name(s): | Rothman, L. B., editor |
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Imprint: |
Pennington, NJ :
Electrochemical Society,
1987.
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Physical Description: |
VII, 272 S. |
Note: |
englisch |
Series Title: |
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Proceedings / Electrochemical Society ;
vol 0087,4. |
Classification: |
ZB | |
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Open Stacks Call number: S 003730-0087,04'01' Barcode: 1087106075 Available |