Symposium on electron and ion beam science and technology. proceedings Seattle, WA, 22.05.78. 8 :

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Bakish, R., (editor)
Princeton, NJ : Electrochemical Society, 1978.
XII, 670 S.
englisch
Symposium on Electron and Ion Beam Science and Technology ; 8.
Proceedings / Electrochemical Society ; 78,5.
electron beam lithography : conference united states : electron optics

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