Modeling of chemical vapor deposition of Tungsten films / Chris R. Kleijn ; Christoph Werner
Saved in:
Table of Contents |
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Personal Name(s): | Kleijn, Chris R., author |
Werner, Christoph, author | |
Imprint: |
Basel :
Springer,
2013
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Physical Description: |
138 Seiten |
Note: |
englisch |
ISBN: |
9783034877435 |
Series Title: |
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Progress in numerical simulation for microelectronics ;
2 |
Subject (ZB): | |
Classification: |
IEK-4 | |
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Institute Call number: S 008803-0002'01' Barcode: 1216101034 Available |