Shape and Functional Elements of the Bulk Silicon Microtechnique [E-Book] : A Manual of Wet-Etched Silicon Structures / by Joachim Frühauf.
Frühauf, Joachim. (author)
Berlin, Heidelberg : Springer, 2005
XII, 222 p. online resource.
Full Text
Table of Contents:
  • Technological Basis of Bulk-Silicon-Microtechnique
  • Orientation Dependent Etching of Silicon
  • General Overview of the Shape- and Functional Elements and the Procedure of their Design
  • Simple Shape Elements
  • Elements for Mechanical Applications
  • Elements for Fluidic Applications
  • Elements for Optical Applications.