Integrated Chemical Microsensor Systems in CMOS Technology [E-Book] / by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann.
Hierlemann, Andreas. (author)
Baltes, H. (editor) / Fujita, Hiroyuki. (editor) / Liepmann, Dorian. (editor)
Berlin, Heidelberg : Springer, 2005
X, 230 p. 125 illus., 5 illus. in color. online resource.
Microtechnology and MEMS
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Table of Contents:
  • Fundamentals of Chemical Sensing
  • Microtechnology for Chemical Sensors
  • Microfabricated Chemical Sensors
  • CMOS Platform Technology for Chemical Sensors
  • Outlook and Future Developments.