Integrated Chemical Microsensor Systems in CMOS Technology [E-Book] / by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann.
This book, "Integrated Chemical Microsensor Systems in CMOS Technology", provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at students, scientists and engineers who are interested in gaining an introduction to the...
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Full text |
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Personal Name(s): | Hierlemann, Andreas. author |
Baltes, H. editor / Fujita, Hiroyuki. editor / Liepmann, Dorian. editor | |
Imprint: |
Berlin, Heidelberg :
Springer,
2005
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Physical Description: |
X, 230 p. 125 illus., 5 illus. in color. online resource. |
Note: |
englisch |
ISBN: |
9783540273721 |
DOI: |
10.1007/b138987 |
Series Title: |
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Microtechnology and MEMS
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Subject (LOC): |
- Fundamentals of Chemical Sensing
- Microtechnology for Chemical Sensors
- Microfabricated Chemical Sensors
- CMOS Platform Technology for Chemical Sensors
- Outlook and Future Developments.