CCD Image Sensors in Deep-Ultraviolet [E-Book] : Degradation Behavior and Damage Mechanisms / by Flora M. Li, Arokia Nathan.
Li, Flora M. (author)
Nathan, Arokia. (author)
Berlin, Heidelberg : Springer, 2005
XII, 232 p. 84 illus. online resource.
englisch
9783540274124
10.1007/b139047
Microtechnology and Mems
Full Text
Table of Contents:
  • Overview of CCD
  • CCD Imaging in the Ultraviolet (UV) Regime
  • Silicon
  • Silicon Dioxide
  • Si-SiO2 Interface
  • General Effects of Radiation
  • Effects of Radiation on CCDs
  • UV-Induced Effects in Si
  • UV Laser Induced Effects in SiO2
  • UV Laser Induced Effects at the Si-SiO2 Interface
  • CCD Measurements at 157nm
  • Design Optimizations for Future Research
  • Concluding Remarks.