CCD Image Sensors in Deep-Ultraviolet [E-Book] : Degradation Behavior and Damage Mechanisms / by Flora M. Li, Arokia Nathan.
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspe...
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Full text |
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Personal Name(s): | Li, Flora M. author |
Nathan, Arokia. author | |
Imprint: |
Berlin, Heidelberg :
Springer,
2005
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Physical Description: |
XII, 232 p. 84 illus. online resource. |
Note: |
englisch |
ISBN: |
9783540274124 |
DOI: |
10.1007/b139047 |
Series Title: |
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Microtechnology and Mems
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Subject (LOC): |
- Overview of CCD
- CCD Imaging in the Ultraviolet (UV) Regime
- Silicon
- Silicon Dioxide
- Si-SiO2 Interface
- General Effects of Radiation
- Effects of Radiation on CCDs
- UV-Induced Effects in Si
- UV Laser Induced Effects in SiO2
- UV Laser Induced Effects at the Si-SiO2 Interface
- CCD Measurements at 157nm
- Design Optimizations for Future Research
- Concluding Remarks.