Methods and Materials in Microelectronic Technology [E-Book] / edited by Joachim Bargon.
The papers collected in this volume were presented at the International Symposium on Methods and Materials in Microelectronic Technology. This symposium was sponsored by IBM Germany, and it was held September 29 - October 1, 1982, in Bad Neuenahr, West Germany. The progress of semiconductor and micr...
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Full text |
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| Personal Name(s): | Bargon, Joachim, editor |
| Imprint: |
Boston, MA :
Springer,
1984
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| Physical Description: |
VIII, 367 p. online resource. |
| Note: |
englisch |
| ISBN: |
9781468448474 |
| DOI: |
10.1007/978-1-4684-4847-4 |
| Series Title: |
The IBM Research Symposia Series
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| Subject (LOC): |
- Impact of Microelectronics- Technical, Economical and Social Aspects
- Milestones in Silicon Semiconductor Technology
- Electronic Transport in Semiconductor Materials
- Recent Advances in the Theory of Impurities and Defects in Semiconductors
- Silicide Contact and Gate in Microelectronic Devices
- Photolithography and X-Ray Lithography
- Electron Beam Lithography
- Microlithography for VLSI and Beyond
- Lithographic Materials
- Reactive Ion Etching and Related Polymerization Processes
- Organic Insulators
- Multilayer Ceramics
- High Performance Cooling and Large Scale Integration
- Limitation of Digital Electronics
- Electron Beam Microcircuit Inspection Technique.