Scanning Electron Microscopy [E-Book] : Physics of Image Formation and Microanalysis / by Ludwig Reimer.
Reimer, Ludwig, (author)
Second Completely Revised and Updated Edition.
Berlin, Heidelberg : Springer, 1998
XIV, 529 p. online resource.
Springer Series in Optical Sciences ; 45
Full Text
Table of Contents:
  • Electron Optics of a Scanning Electron Microscope
  • Electron Scattering and Diffusion
  • Emission of Backscattered and Secondary Electrons
  • Electron Detectors and Spectrometers
  • Image Contrast and Signal Processing
  • Electron-Beam-Induced Current and Cathodoluminescence
  • Special Techniques in SEM
  • Crystal Structure Analysis by Diffraction
  • Elemental Analysis and Imaging with X-Rays.