Low-Energy Ion Irradiation of Solid Surfaces [E-Book] / by Hubert Gnaser.
Gnaser, Hubert, (author)
Berlin, Heidelberg : Springer, 1999
VIII, 294 p. 69 illus., 9 illus. in color. online resource.
Springer Tracts in Modern Physics ; 146
Full Text
Table of Contents:
  • Interaction of low-energy ions with solids
  • Composition changes in multicomponent materials
  • Ion bombardment of crystalline semiconductors
  • Ionization processes of sputtered atoms and molecules.