Low-Energy Ion Irradiation of Solid Surfaces [E-Book] / by Hubert Gnaser.
The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization proc...
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Full text |
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Personal Name(s): | Gnaser, Hubert, author |
Imprint: |
Berlin, Heidelberg :
Springer,
1999
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Physical Description: |
VIII, 294 p. 69 illus., 9 illus. in color. online resource. |
Note: |
englisch |
ISBN: |
9783540497738 |
DOI: |
10.1007/BFb0110693 |
Series Title: |
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Springer Tracts in Modern Physics ;
146 |
Subject (LOC): |
- Interaction of low-energy ions with solids
- Composition changes in multicomponent materials
- Ion bombardment of crystalline semiconductors
- Ionization processes of sputtered atoms and molecules.