Amorphous and Crystalline Silicon Carbide II [E-Book] : Recent Developments Proceedings of the 2nd International Conference, Santa Clara, CA, December 15—16, 1988 / edited by Mahmud M. Rahman, Cary Y.-W. Yang, Gary L. Harris.
Harris, Gary L., (editor)
Rahman, Mahmud M., (editor) / Yang, Cary Y.-W., (editor)
Berlin, Heidelberg : Springer, 1989
X, 232 p. online resource.
englisch
9783642750489
10.1007/978-3-642-75048-9
Springer Proceedings in Physics ; 43
Full Text
Table of Contents:
  • I Growth of Crystalline Silicon Carbide
  • Crystalline SiC on Si and High Temperature Operational Devices (With 7 Figures)
  • Heteroepitaxial Growth of Cubic SiC on a Si Substrate Using the Si2H6-C2H2-H2 System (With 6 Figures)
  • Chemical Vapor Deposition of Single Crystal ?-SiC (With 4 Figures)
  • ?-Silicon Carbide Prepared by Rapid Thermal Chemical Vapor Deposition (With 4 Figures)
  • Single Crystal Growth of 6H-SiC by a Vacuum Sublimation Method, and Blue LEDs (With 17 Figures)
  • Polytype Change of Silicon Carbide at High Temperatures (With 3 Figures)
  • Epitaxial Growth of (SiC)xGe1-x on Silicon Substrates (With 1 Figure)
  • One-Dimensional Fluid Mechanics/Kinetics Modeling of the CVD of SiC in a Vertical Reactor
  • II Growth of Amorphous, Microcrystalline, and Polycrystalline Silicon Carbide
  • Properties of a-SiC:H Films Prepared with a Field-Enhanced RF Glow-Discharge System (With 4 Figures)
  • Preparation of Microcrystalline Silicon Carbide Thin Films for the Emitter of Si HBTs (With 4 Figures)
  • High-Quality Microcrystalline SiC Films Fabricated by the Controlled Plasma Magnetron Method (With 10 Figures)
  • Electron-Cyclotron-Resonance Plasma Deposition of Carbon onto Silicon (With 8 Figures)
  • Preparation and Characterization of Amorphous SiC Film by a Liquid Route (With 2 Figures)
  • III Characterization of Silicon Carbide
  • Gap States of Highly Photosensitive a-SiC:H (With 5 Figures)
  • X-Ray Photoelectron Spectroscopy Study of Hydrogenated Amorphous Silicon Carbide Films (With 4 Figures)
  • Doping-Induced Structural Change in Amorphous Silicon (Carbon) Hydrogen Alloy (With 6 Figures)
  • Small Angle X-Ray Scattering from Microvoids in the a-SiC:H Alloy (With 3 Figures)
  • Studies on Carrier Lifetime and Deep Levels in CVD-Grown 3C-SiC by Photoconductivity and Microwave Absorption (With 8 Figures)
  • ESR Study of Defects in Epitaxially Grown 3C-SiC (With 4 Figures)
  • Time-Resolved Photoluminescence Studies of Undoped and Al-Doped Cubic SiC (With 3 Figures)
  • Photoluminescence Imaging of Spatial Distribution of Recombination Centers in Cubic SiC (With 3 Figures)
  • Stress-Induced Defects vs Growth Faults in CVD-Grown SiC
  • Crystalline Defects in ?-SiC as Revealed by a NaOH-KOH Eutectic Etch (With 6 Figures)
  • Ellipsometric Study of Cubic SiC
  • Photoluminescence and Transmission Electron Microscopy of Defects in SiC Grown on Si
  • Vibrational and Electrical Properties of n and p Doped a-SiC:H Films
  • IV Growth and Applications of Diamond Thin Films
  • Current Status of Diamond Thin Films
  • New Material and Device Design Considerations for High-Power Electronics
  • Active and Passive Electronic Applications of CVD Diamond Films
  • V Surfaces and Interfaces of Silicon Carbide
  • Surface and Interface Studies of SiC (Buffer-Layer)/Si(100) (With 6 Figures)
  • The Influence of Hydrogen on the Transition from Amorphous to Crystalline Structure in Plasma Deposition of Silicon and Alloys
  • Microstructure of the a-Si1-xCx:H/c-Si Interface (With 2 Figures)
  • Atomic Layer Control in Cubic SiC Growth Utilizing Surface Superstructure in Gas Source MBE (With 7 Figures)
  • On the Stability of a Cr + C Phase on (100) 3C SiC at Elevated Temperatures
  • VI Processing and Device Applications of Silicon Carbide
  • Physics and Applications of Amorphous Silicon Carbide (With 6 Figures)
  • ?-SiC on Titanium Carbide for Solid State Devices (With 12 Figures)
  • Fabrication of MOSFETs on ?-SiC Single Crystalline Layers Grown on Si(100) Substrates (With 6 Figures)
  • A High Transconductance ?-SiC Buried-Gate Junction Field Effect Transistor (With 5 Figures)
  • SiC as a Potential FET Gate Insulator (With 8 Figures)
  • Applications of High Purity SiC Prepared by Chemical Vapor Deposition (With 12 Figures)
  • SiC/Si HBT Using Polycrystalline SiC Layers Prepared by Electron Beam Evaporation (With 5 Figures)
  • Thin Film Transistors Using Polycrystalline SiC (With 8 Figures)
  • Mechanisms in Reactive Ion Etching of Silicon Carbide Thin Films (With 6 Figures)
  • W/SiC Contact Resistance at Elevated Temperatures (With 2 Figures)
  • Application of Excimer Laser Processing in SiC Device Fabrication
  • Index of Contributors.