Hydrogen in Crystalline Semiconductors [E-Book] / by Stephen J. Pearton, James W. Corbett, Michael Stavola.
Pearton, Stephen J., (author)
Corbett, James W., (author) / Stavola, Michael, (author)
Berlin, Heidelberg : Springer, 1992
XI, 363 p. online resource.
englisch
9783642847783
10.1007/978-3-642-84778-3
Springer Series in Materials Science ; 16
Full Text
Table of Contents:
  • 1. Introduction
  • 2. Hydrogen Incorporation in Crystalline Semiconductors
  • 2.1 Techniques for Hydrogen Incorporation in Semiconductors
  • 2.2 Survey of the Configurations of Hydrogen in Semiconductors
  • 3. Passivation of Deep Levels by Hydrogen
  • 3.1 Deep-Level Passivation in Silicon
  • 3.2 Passivation of Defects in Gallium Arsenide
  • 3.3 Aluminum Gallium Arsenide
  • 3.4 Gallium Phosphide
  • 3.5 CdHgTe, Zn3P2
  • 3.6 Germanium
  • 4. Shallow Impurity Passivation by Atomic Hydrogen
  • 4.1 Silicon
  • 4.2 Gallium Arsenide
  • 4.3 AlGaAs
  • 4.4 CdTe and ZnTe
  • 4.5 Gallium Phosphide
  • 4.6 Germanium
  • 4.7 Indium Phosphide
  • 4.8 BN and BP
  • 4.9 Correlation with Muonium
  • 5. Microscopic Properties of Hydrogen-Related Complexes in Silicon from Vibrational Spectroscopy
  • 5.1 Vibrational Spectroscopy of H-Related Complexes
  • 5.2 Uniaxial Stress Studies of H-Related Complexes
  • 5.3 Hydrogen Motion in the B-H Complex
  • 5.4 Conclusion
  • 6. The Microscopic Characteristics of Impurity-Hydrogen Complexes in III-V Semiconductors
  • 6.1 Acceptor-H Complexes
  • 6.2 Donor-H Complexes
  • 6.3 Unintentional Hydrogenation
  • 6.4 Uniaxial Stress Studies
  • 6.5 Cluster Calculations for H-Related Complexes in GaAs
  • 6.6 Conclusion
  • 7. Hydrogen, and Semiconductor Surfaces and Surface Layers
  • 7.1 Etching of Silicon Surfaces by Hydrogen
  • 7.2 Plasma Etching
  • 7.3 Implantation of Protons
  • 7.4 Hydrogen on Semiconductor Surfaces
  • 8. Hydrogen-Related Defects in Semiconductors
  • 8.1 Hydrogen-Related Defects in Silicon
  • 8.2 Hydrogen-Related Defects in Germanium
  • 8.3 Hydrogen-Related Defects in Compound Semiconductors
  • 8.4 Hydrogen-Related IR Bands in Silicon
  • 9. Diffusion of Hydrogen in Semiconductors
  • 9.1 Diffusion of Hydrogen in Solids
  • 9.2 Diffusion Equations
  • 9.3 Analysis of Diffusion Profiles
  • 9.4 Diffusion of Hydrogen in Silicon
  • 9.5 Diffusion of Hydrogen in Germanium
  • 9.6 Diffusion in Gallium Arsenide
  • 9.7 Diffusion of Hydrogen in Other Materials
  • 9.8 Summary
  • 10. Resonance Studies Pertinent to Hydrogen in Semiconductors
  • 10.1 Electron Paramagnetic Resonance
  • 10.2 Related Muon Studies
  • 10.3 Perturbed Angular Correlation
  • 11. Prevalence of Hydrogen Incorporation and Device Applications
  • 11.1 Experimental Studies of Hydrogen Incorporation
  • 11.2 Hydrogen Sensing with MOS Structures
  • 11.3 Hydrogen in III-V Semiconductors
  • 12. Hydrogen and the Mechanical Properties of Semiconductors
  • 12.1 Hydrogen Embrittlement
  • 12.2 Hydrogen-Related Defects
  • 12.3 m-V Semiconductors
  • References.