Tribology Issues and Opportunities in MEMS [E-Book] : Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997 / edited by Bharat Bhushan.
Bhushan, Bharat, (editor)
Dordrecht : Springer, 1998
XIV, 655 p. online resource.
Full Text
Table of Contents:
  • MEMS R&D in Europe
  • Integrated MEMS in Conventional CMOS
  • Facilitating Choices of Machining Tools and Materials for ‘Miniaturization Science’: A Review
  • Microfabrication Technologies for High Performance Microactuators
  • Surface Characterization of Non-Lithographic Micromachining
  • Biosensors and Microfluidic Systems
  • Power MEMS Materials and Structures
  • MEMS Opportunities in Accelerometers and Gyros and the Microtribology Problems Limiting Commercialization
  • New Technology and Applications at Lucas NovaSensor
  • Rough Surface Characterization
  • Frictional Instabilities
  • Wear of Ceramics and Metals
  • Mechanics of Wear: From Conventional Components to MEMS
  • Rheological Modeling of Thin Film Lubrication
  • Surface Roughness Induced Effects in Hydrodynamic Lubrication
  • Transition from Elastohydrodynamic to Partial Lubrication
  • Micro/Nanotribology: State of the Art and Its Applications
  • Pulsed Force Mode: A New Method for Characterizing Thin Silane Films by Adhesive Force Measurements
  • Formation of Nanometer-Scale Contacts to Viscoelastic Materials: Implications for MEMS
  • Nanotribology of Vapor-Phase Lubricants
  • The Tribology of Hydrocarbon Surfaces Investigated Using Molecular Dynamics
  • Dual-Axis Piezoresistive AFM Cantilever for Independent Detection of Vertical and Lateral Forces
  • Statistical Thermodynamic Treatment of the AFM Tip in Liquid
  • Tribological Issues of Polysilicon Surface-Micromachining
  • Advantages and Limitations of Silicon as a Bearing Material for MEMS Applications
  • Surface Force Induced Failures in Microelectromechanical Systems
  • Development, Fabrication and Testing of a Multi-Stage Micro Gear System
  • Analysis of Gear Tooth Performance of Mechanically-Coupled, Outer-Rotor Polysilicon Micromotors
  • Micro/Nanotribological Studies of Single-Crystal Silicon and Polysilicon and SiC Films for Use in MEMS Devices
  • Phase Transformations in Semiconductors under Contact Loading
  • Influence of Water Adsorption on Microtribology of Micromachines
  • Tribological Effects of Surface Roughness in MEMS Devices
  • Active Friction Control Using Ultrasonic Vibration
  • Contact Resistance Measurements and Modeling of an Electrostatically Actuated Microswitch
  • Metrology for MEMS Tribology
  • Mechanical Property Determination Using Nanoindentation Techniques
  • Stress in Thin Films for MEMS Actuators
  • Reliability and Fatigue Testing of MEMS
  • Surface Modification and Mechanical Properties of Bulk Silicon
  • Microfriction and Microwear Experiments on Metal Containing Amorphous Hydrocarbon Hard Coatings Using an Atomic Force Microscope: Mechanisms, Models and Micro- versus Macrotests
  • Formation of Carbon Films on Ceramic Carbides by High Temperature Chlorination
  • Deposition and Characterization of Diamond-Like Materials
  • Wear and Nanomechanical Studies of Silicon Oxide and Silicon Nitride Thin Films for MEMS Applications
  • a-SiC Thin Films Deposited Using Pulsed Laser Ablation of Graphite and Magnetron Sputtering of Silicon onto Steel Substrates at Room Temperature
  • Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers: Coefficient of Static Friction Measurements
  • Tribological Properties of Modified MEMS Surfaces
  • Breakout Session Report: Tribology Research in MEMS
  • Breakout Session Report: Mechanisms of Nano-Scale Tribology and Instrumentation for MEMS Devices
  • Breakout Session Report: Lubricants, Overcoats and Surface Modification Techniques
  • Breakout Session Report: Mechanical Property Measurements
  • Panel Discussion Report: Tribology Issues and Opportunities in MEMS
  • List of Participants
  • Editor’s Vita.