@book{ Solr-734601, title = {Lithography : principles, processes and materials [E-Book]}, series = {Engineering tools, techniques and tables}, series = {Nanotechnology science and technology}, author = {Hennessy, Theodore C.}, editor = {Hennessy, Theodore C.}, address = {New York}, publisher = {Nova Science}, year = {2011}, pages = {284}, note = {englisch}, url = {https://ebookcentral.proquest.com/lib/fz/detail.action?docID=3018148} }