Micro electro mechanical systems (MEMS) : technology, fabrication processes and applications [E-Book] / Britt Ekwall and Mikkel Cronquist, editors.
Ekwall, Britt.
Cronquist, Mikkel.
Hauppauge, N.Y. : Nova Science Publishers, c2010
xii, 391 pages : illustrations (some col.).
englisch
Nanotechnology science and technology
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