. (1991). Plasma processing of materials: Scientific opportunities and technological challenges [E-Book] / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. Washington, D.C.: National Academy Press.
Chicago Style CitationPlasma Processing of Materials: Scientific Opportunities and Technological Challenges [E-Book] / Panel On Plasma Processing of Materials, Plasma Science Committee, Board On Physics and Astronomy, Commission On Physical Sciences, Mathematics, and Applications, National Research Council. Washington, D.C.: National Academy Press, 1991.
MLA CitationPlasma Processing of Materials: Scientific Opportunities and Technological Challenges [E-Book] / Panel On Plasma Processing of Materials, Plasma Science Committee, Board On Physics and Astronomy, Commission On Physical Sciences, Mathematics, and Applications, National Research Council. Washington, D.C.: National Academy Press, 1991.