Handbook of silicon based MEMS materials and technologies [E-Book] / edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others].
Aalto, Timo, (contributor)
Tilli, Markku, (editor)
Second edition.
Amsterdam, [Netherlands] : William Andrew, 2015
1 online resource (827 pages), illustrations (some color), photographs.
englisch
9780323312233
9780323299657
Micro & Nano Technologies Series
Full Text
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