Handbook of silicon based MEMS materials and technologies [E-Book] / edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others].
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Full text |
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Personal Name(s): | Aalto, Timo, author |
Tilli, Markku, editor | |
Edition: |
Second edition. |
Imprint: |
Amsterdam, [Netherlands] :
William Andrew,
2015
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Physical Description: |
1 online resource (827 pages), illustrations (some color), photographs. |
Note: |
englisch |
ISBN: |
9780323312233 9780323299657 |
Series Title: |
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Micro & Nano Technologies Series
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Subject (LOC): |
Description not available. |