Fundamentals of microfabrication and nanotechnology. from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications [E-Book] / Marc J. Madou. Volume III :
Madou, Marc J., (author)
Third edition.
Boca Raton, Florida ; CRC Press, 2011
1 online resource (642 pages), illustrations (some color), tables
englisch
9781420055160
9781439895245
Full Text
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