Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications [E-Book] / Marc J. Madou.
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Full text |
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Personal Name(s): | Madou, Marc J., author |
Edition: |
Third edition. |
Imprint: |
Boca Raton, Florida ;
CRC Press,
2011
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Physical Description: |
1 online resource (642 pages), illustrations (some color), tables |
Note: |
englisch |
ISBN: |
9781420055160 9781439895245 |
Subject (ZB): | |
Classification: |
Description not available. |