Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou

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Madou, Marc J., ( Verfasser)
Third edition
Boca Raton, Fla. : CRC Press, 2012
XIII, 641 Seiten
englisch
9781420055115
Fundamentals of microfabrication and nanotechnology ; 1
Table of Contents

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