Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou
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Table of Contents |
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Personal Name(s): | Madou, Marc J., author |
Edition: |
Third edition |
Imprint: |
Boca Raton, Fla. :
CRC Press,
2012
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Physical Description: |
XIII, 641 Seiten |
Note: |
englisch |
ISBN: |
9781420055115 |
Series Title: |
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Fundamentals of microfabrication and nanotechnology ;
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Reading Room Call number: FGN 209-01 Barcode: 1219101240 Available |