Laser Heat-Mode Lithography [E-Book] : Principle and Methods / by Jingsong Wei.
Wei, Jingsong, (author)
1st edition 2019.
Singapore : Springer, 2019
XIII, 208 pages 182 illustrations, 160 illustrations in color (online resource)
Springer Series in Materials Science ; 291
Full Text
Table of Contents:
  • Current status of lithography
  • Principles of laser heat-mode lithography and thermal diffusion
  • Laser heat-mode maskless lithography system
  • Manipulation of thermal diffusion channels
  • Laser heat-mode nanolithography on phase-change thin films
  • Direct laser heat-mode nanopatterning on metallo-organic compound thin films
  • Laser heat-mode patterning of transparent thin films
  • Laser heat-mode grayscale image lithography
  • Patterns transfer processes and applications.