Laser Heat-Mode Lithography [E-Book] : Principle and Methods / by Jingsong Wei.
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applicati...
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Full text |
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Personal Name(s): | Wei, Jingsong, author |
Edition: |
1st edition 2019. |
Imprint: |
Singapore :
Springer,
2019
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Physical Description: |
XIII, 208 pages 182 illustrations, 160 illustrations in color (online resource) |
Note: |
englisch |
ISBN: |
9789811509438 |
DOI: |
10.1007/978-981-15-0943-8 |
Series Title: |
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Springer Series in Materials Science ;
291 |
Subject (LOC): |
- Current status of lithography
- Principles of laser heat-mode lithography and thermal diffusion
- Laser heat-mode maskless lithography system
- Manipulation of thermal diffusion channels
- Laser heat-mode nanolithography on phase-change thin films
- Direct laser heat-mode nanopatterning on metallo-organic compound thin films
- Laser heat-mode patterning of transparent thin films
- Laser heat-mode grayscale image lithography
- Patterns transfer processes and applications.