Preparation and properties of thin films.

Saved in:
Tu, K. N., (editor)
New-York, NY : Academic Pr., 1982.
XI, 337 S.
englisch
0123418240
9780123418241
Treatise on materials science and technology ; 24.
preparation and property correlations in thin films
molecular beam epitaxy of superlattices in thin films
epitaxial growth of silicon structures: thermal, laser, and electron beam induced
characterization of grain boundaries in bicrystalline thin films
mechanical properties of thin films on substrates
ion beam modification of thin films
thin alloy films for metallization in microelectronic devices
fabrication and physical properties of ultrasmall structures

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