Preparation and properties of thin films.
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| Personal Name(s): | Tu, K. N., editor |
|---|---|
| Imprint: |
New-York, NY :
Academic Pr.,
1982.
|
| Physical Description: |
XI, 337 S. |
| Note: |
englisch |
| ISBN: |
0123418240 9780123418241 |
| Series Title: |
Treatise on materials science and technology ;
24. |
| Keywords: |
preparation and property correlations in thin films molecular beam epitaxy of superlattices in thin films epitaxial growth of silicon structures: thermal, laser, and electron beam induced characterization of grain boundaries in bicrystalline thin films mechanical properties of thin films on substrates ion beam modification of thin films thin alloy films for metallization in microelectronic devices fabrication and physical properties of ultrasmall structures |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
Call Number: S 002070-0024'01' Barcode: 1085003630
