Preparation and properties of thin films.
Saved in:
Personal Name(s): | Tu, K. N., editor |
---|---|
Imprint: |
New-York, NY :
Academic Pr.,
1982.
|
Physical Description: |
XI, 337 S. |
Note: |
englisch |
ISBN: |
0123418240 9780123418241 |
Series Title: |
/* Depending on the record driver, $field may either be an array with
"name" and "number" keys or a flat string containing only the series
name. We should account for both cases to maximize compatibility. */?>
Treatise on materials science and technology ;
24. |
Keywords: |
preparation and property correlations in thin films molecular beam epitaxy of superlattices in thin films epitaxial growth of silicon structures: thermal, laser, and electron beam induced characterization of grain boundaries in bicrystalline thin films mechanical properties of thin films on substrates ion beam modification of thin films thin alloy films for metallization in microelectronic devices fabrication and physical properties of ultrasmall structures |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
LEADER | 01571cam a2200373 n 4500 | ||
---|---|---|---|
001 | 103609 | ||
005 | 19980202000000.0 | ||
008 | r1982 | ||
020 | |a 0123418240 | ||
035 | |a (Sirsi) a93884 | ||
084 | 0 | |a FGK - Thin film technology, epitaxy |2 ZB | |
084 | 0 | |a FFP - Physics of thin films |2 ZB | |
084 | 1 | |a FGK - Dünnfilmtechnologie, Epitaxie |2 LS | |
245 | 0 | 0 | |a Preparation and properties of thin films. |
260 | |a New-York, NY : |b Academic Pr., |c 1982. | ||
300 | |a XI, 337 S. | ||
490 | 0 | |a Treatise on materials science and technology ; |v 24. | |
500 | |a englisch | ||
596 | |a 1 26 | ||
650 | 4 | |a thin film | |
653 | |a preparation and property correlations in thin films | ||
653 | |a molecular beam epitaxy of superlattices in thin films | ||
653 | |a epitaxial growth of silicon structures: thermal, laser, and electron beam induced | ||
653 | |a characterization of grain boundaries in bicrystalline thin films | ||
653 | |a mechanical properties of thin films on substrates | ||
653 | |a ion beam modification of thin films | ||
653 | |a thin alloy films for metallization in microelectronic devices | ||
653 | |a fabrication and physical properties of ultrasmall structures | ||
700 | 1 | |a Tu, K. N., |e Hrsg. | |
900 | |a S 002070-0024'01' | ||
900 | |a FGK 011 | ||
908 | |a Monographie, Sammelwerk | ||
949 | |a S 002070-0024'01' |w LC |c 1 |i 1085003630 |l STACKS |m IFF |r Y |s Y |t INSTB |u 25/3/2009 |x INST-F |1 PRINT | ||
949 | |a FGK 011 |w LC |c 1 |i 1083001115 |d 26/7/2012 |e 20/6/2012 |l STACKS |m ZB |n 11 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |