Plasma processing for VLSI.
Saved in:
| Personal Name(s): | Einspruch, N. G., editor |
|---|---|
| Imprint: |
Orlando, FL :
Academic Pr.,
1984.
|
| Physical Description: |
XIV, 527 S. |
| Note: |
englisch |
| ISBN: |
0122341082 9780122341083 |
| Series Title: |
VLSI electronics microstructure science ;
8. |
| Keywords: |
VLSI : ion etching |
| Classification: | |
| Shelf Classification: |
Call number: B 054847'01'-008 Barcode: 1087001072
