Journal of Vacuum Science and Technology [E-Journal]
Saved in:
|
Go to E-Journal |
|
| ISSN: |
0022-5355 (Druckausgabe) |
| EZB-ID: |
60982 |
| ZDB-ID: |
2212422-6 |
| Imprint: |
American Vacuum Society (AVS)
|
| Keywords: |
Physik Chemistry - General and Others Engineering - Mechanical Engineering |
| Loading |
| LEADER | 00967cam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | (Sirsi) aEZB_60982 | ||
| 035 | |a (Sirsi) aEZB_60982 | ||
| 022 | |a 0022-5355 |q (Druckausgabe) | ||
| 022 | |9 00225355 |q (Druckausgabe) | ||
| 024 | |a 2212422-6 |2 ZDBID | ||
| 024 | |a 60982 |2 EZBID | ||
| 245 | 0 | 0 | |a Journal of Vacuum Science and Technology [E-Journal] |
| 222 | |a Journal of Vacuum Science and Technology [E-Journal] |a JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY (SFX) |a J. VAC. SCI. & TECHNOL (SFX) |a J. VAC. SCI. TECH (SFX) |a J. Vac. Sci. Technol. (JuSER) |a J. Vac. Sci. & Technol. (USA) (JuSER) |a J of Vacuum Sci. Technol. (JuSER) | ||
| 260 | |b American Vacuum Society (AVS) | ||
| 960 | |b American Vacuum Society (AVS) | ||
| 653 | |a Physik |a Chemistry - General and Others |a Engineering - Mechanical Engineering | ||
| 856 | |u https://pubs.aip.org/avs/jvst/issue/21/4 |z Zeitschrift aufrufen | ||
| 915 | |0 StatID:(DE-HGF)0200 |2 StatID | ||
| 915 | |0 StatID:(DE-HGF)0430 |2 StatID | ||
| 949 | |t ZBZEZB |t ZBAZ |y 2 | ||