Gerharz, J., Padmaraju, K., Moers, J., & Grützmacher, D. (2010). Etching Titanium Nitride gate stacked on high-k dielectric.
Chicago Style CitationGerharz, J., K. Padmaraju, J. Moers, andfavorite D. Grützmacher. Etching Titanium Nitride Gate Stacked On High-k Dielectric. 2010.
MLA CitationGerharz, J., K. Padmaraju, J. Moers, andfavorite D. Grützmacher. Etching Titanium Nitride Gate Stacked On High-k Dielectric. 2010.
Warning: These citations may not always be 100% accurate.