This title appears in the Scientific Report :
2010
Etching Titanium Nitride gate stacked on high-k dielectric
Etching Titanium Nitride gate stacked on high-k dielectric
Saved in:
Personal Name(s): | Gerharz, J. |
---|---|
Padmaraju, K. / Moers, J. / Grützmacher, D. | |
Contributing Institute: |
Halbleiter-Nanoelektronik; IBN-1 JARA-FIT; JARA-FIT |
Published in: |
Proceedings of the 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy from 19 to 22 September 2010 |
Imprint: |
2010
|
Document Type: |
Contribution to a book Contribution to a conference proceedings |
Research Program: |
Grundlagen für zukünftige Informationstechnologien |
Publikationsportal JuSER |
LEADER | 02221nam a2200493 a 4500 | ||
---|---|---|---|
001 | 12020 | ||
005 | 20180208200720.0 | ||
037 | |a PreJuSER-12020 | ||
100 | 1 | |a Gerharz, J. |b 0 |u FZJ |0 P:(DE-Juel1)VDB76721 | |
245 | |a Etching Titanium Nitride gate stacked on high-k dielectric | ||
260 | |c 2010 | ||
295 | 1 | 0 | |a Proceedings of the 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy from 19 to 22 September 2010 |
500 | |a Record converted from VDB: 12.11.2012 | ||
500 | |3 Conference proceedings / Book | ||
700 | 1 | |a Padmaraju, K. |b 1 |0 P:(DE-HGF)0 | |
700 | 1 | |a Moers, J. |b 2 |u FZJ |0 P:(DE-Juel1)VDB5547 | |
700 | 1 | |a Grützmacher, D. |b 3 |u FZJ |0 P:(DE-Juel1)125588 | |
909 | C | O | |o oai:juser.fz-juelich.de:12020 |p VDB |
913 | 1 | |k P42 |v Grundlagen für zukünftige Informationstechnologien |l Grundlagen für zukünftige Informationstechnologien (FIT) |b Schlüsseltechnologien |0 G:(DE-Juel1)FUEK412 |x 0 | |
914 | 1 | |a Proceedings |y 2010 | |
970 | |a VDB:(DE-Juel1)123488 | ||
980 | |a VDB | ||
980 | |a ConvertedRecord | ||
980 | |a book | ||
980 | |a conf | ||
980 | |a I:(DE-Juel1)PGI-9-20110106 | ||
980 | |a I:(DE-82)080009_20140620 | ||
980 | |a UNRESTRICTED | ||
536 | |a Grundlagen für zukünftige Informationstechnologien |c P42 |2 G:(DE-HGF) |0 G:(DE-Juel1)FUEK412 |x 0 | ||
336 | |a CONFERENCE_PAPER |2 ORCID | ||
336 | |a Software |0 33 |2 EndNote | ||
336 | |a Contribution to a book |0 PUB:(DE-HGF)7 |2 PUB:(DE-HGF) | ||
336 | |a Contribution to a conference proceedings |0 PUB:(DE-HGF)8 |2 PUB:(DE-HGF) | ||
336 | |a INPROCEEDINGS |2 BibTeX | ||
336 | |a conferenceObject |2 DRIVER | ||
336 | |a Output Types/Conference Paper |2 DataCite | ||
981 | |a I:(DE-Juel1)PGI-9-20110106 | ||
920 | |k Halbleiter-Nanoelektronik; IBN-1 |d 31.12.2010 |g IBN |l Halbleiter-Nanoelektronik |0 I:(DE-Juel1)VDB799 |x 0 | ||
981 | |a I:(DE-Juel1)VDB881 | ||
920 | |k JARA-FIT; JARA-FIT |0 I:(DE-82)080009_20140620 |l Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology |g JARA |x 1 | ||
990 | |a Gerharz, J. |b 0 |u FZJ |0 P:(DE-Juel1)VDB76721 | ||
991 | |a Grützmacher, Detlev |b 3 |u FZJ |0 P:(DE-Juel1)125588 | ||
991 | |a Moers, J. |b 2 |u FZJ |0 P:(DE-Juel1)VDB5547 | ||
991 | |a Padmaraju, K. |b 1 |0 P:(DE-HGF)0 |